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Application Description

CORESIC® RB H SiC material are reaction bonded silicon carbide infiltrated with 5N grade polysilicon, an ideal material for making high strength high purity SiC components, customized for solar cell thermal process and deposition process.CORESIC® RB H SiC material has high density, high strength, high thermal conductivity, strong oxidation resistance, strong acid corrosion resistance and high temperature resistance. The components will not deform even if they are used long time in a working environment of 1300°C, which helps to improve the product quality and manufacturing efficiency of the diffusion process, oxidation /annealing process, LPCVD process, PECVD process.

Application Scenarios

Diffusion Furnace

Diffusion Furnace