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Product Introduction


Silicon carbide RTA carrier plate

CORESIC® SP silicon carbide RTA carrier plate is formed by isostatic pressing process and high temperature sintering. The outer diameter, thickness size, number of acupuncture points, size, position and shape of the film-taking slot can also be processed according to the requirements of the user's design drawings to meet the specific requirements of the user.

 

Typical application

  • RTA rapid high-temperature heat treatment process in LED chip manufacturing.

Features and advantages

  • Excellent thermal conductivity, low expansion coefficient, and good thermal shock resistance.

  • Resistance to plasma impact.

  • Corrosion resistant to various strong acid and alkali chemical reagents.

Specification

  • It can be processed according to the customer's drawing requirements, the maximum size: 500mm*500mm

 

Key words:

specified accuracy, processing

Product Message